본문바로가기

Semiconductor Business

Leading the future semiconductor industry with eco-friendly materials and glass substrate processing technology.

Overview



TGV (Through Glass Via) is a next-generation technology in semiconductor packaging,
and it replaces silicon or organic based substrate with glass.

Leveraging our mass production experience in hybrid OLED glass
etching processes, Chemtronics established manufacturing
capabilities for Through-Glass Via (TGV) processes that combine
laser and wet etching techniques.

Chemtronics now has the required core technology, mass
production experience, and site infrastructure approved for
hydrofluoric acid usage,
offering a competitive edge in the
development of glass substrates.

Chemtronics is focused on the development of TGV (Through Glass Via) process technology for glass substrates.
In order to strengthen our competitiveness in the glass substrate market, we are pursuing in-house integration of the entire process including
laser processing, wet etching, AOI (Automated Optical Inspection), Cu plating, and CMP (Chemical Mechanical Polishing).
This approach ensures improved process efficiency and stable product quality.

SCM

유리기판 도식화2

Swipe left and right.

Key Competitive Advantages

Process Details
Laser Modification
  • - Precision, high-density via hole formation
  • - Achieved high aspect ratio
Wet Etching
  • - Control hole shape
  • - Own large-area hydrofluoric acid (HF) and alkaline etching solution
  • - Manage roughness inside holes and on surface of glass
  • - Experience in mass production of thin glass etching and own infrastructure
AOI Inspection
  • - Own post-processing defect detection and yield management solutions
Cu Plating
  • - Under development (Achieve void-free plating and strong adhesive properties)
CMP(Metal)
  • - TTV management
  • - Experience and know-how in CMP processes
  • - Acquired semiconductor company and own CMP facilities

Swipe left and right.

Process

Chemtronics has established an optimized supply chain based on SCM, and by integrating key processes,
we have enhanced production efficiency and quality competitiveness.

Currently, we operate the entire process from laser, wet etching, AOI inspection, Cu plating, to CMP, and
are establishing an integrated system that covers production and delivery of finished products.

  • scm 프로세스 이미지1

    01

    Glass
    (up to 510x515mm)

  • scm 프로세스 이미지2

    02

    Laser
    Modification

  • scm 프로세스 이미지3

    03

    Wet Etching

  • scm 프로세스 이미지4

    04

    AOI Inspection

  • scm 프로세스 이미지5

    05

    Seed layer deposition

  • scm 프로세스 이미지6

    06

    Cu Plating

  • scm 프로세스 이미지7

    07

    CMP(Metal)

TGV Process Technical Expertise

  • Control hole shape and achieve high aspect ratio
  • Own large-area hydrofluoric acid (HF) and alkaline etching solution
  • Post shape processing, defect detection and yield management solutions
  • Manage roughness inside of holes and on surface of glass
  • Manage Glass TTV

TGV Process Video