RESEARCH
Leveraging accumulated technological expertise to develop
semiconductor materials that span the entire process
Chemtronics Electronic Materials Research Center is the key R&D organization for our semiconductor materials business.
Since its establishment in 2006, we have continuously developed
ultra-high purity materials for electronic-grade applications, and
have built capabilities in synthesis and precision formulation
technologies.
Our team of talented researchers is developing advanced
materials to be used in the semiconductor processes, and our
differentiated technical expertise and development capabilities
are contributing to the growth of the electronic materials
industry and expanding the range of applications.
At the Chemtronics Electronic Materials Research Center, we develop a wide range of materials, including
solvents, polymers, and electro-chemical materials, with a long-term growth strategy focused primarily on solvents.
Key R&D Projects
-
-
01. Development of semiconductor hardmask materials
Development of high-functional polymers for hardmask with etch resistance and plasma tolerance, optimized for advanced processes
-
-
02. Research in synthesis of monomers and functional additives for photolithography processes
Design and synthesis of ultra-high purity monomers and functional additives to enhance the performance of Photo Resist (PR) materials
used in EUV and ArF photolithography processes.
-
-
03. Development of cleaning solutions for semiconductor processes
Development of high-purity and chemically stable cleaning solutions to improve efficiency of wafer cleaning and removal of PR and other residues.
-
-
04. Development of Polymers
Develop polymer-based materials that offer superior corrosion resistance and thermal stability for fine-patterning processes.
